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WAFER TYPE
CLASS 150, 300 and 600
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CLASS
150
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SIZE
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L
|
FLANGE DIMENSION
|
H
|
H1
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H2
|
D2
|
L1
|
MOUNTING BASE
|
Weight (Kgf)
|
|
inch
|
mm
|
C
|
h
|
a
|
h1
|
TYPE
|
C1
|
n
|
h2
|
|
3
|
80
|
48
|
152.4
|
-
|
-
|
19.1
|
282
|
258
|
142
|
200
|
165
|
F07
|
70
|
4
|
9
|
21
|
|
4
|
100
|
54
|
190.5
|
-
|
-
|
19.1
|
294
|
270
|
162
|
200
|
165
|
F07
|
70
|
4
|
9
|
27
|
|
5
|
125
|
57
|
215.9
|
-
|
-
|
22.2
|
319
|
295
|
170
|
200
|
165
|
F07
|
70
|
4
|
9
|
32
|
|
6
|
150
|
57
|
241.3
|
-
|
-
|
22.2
|
340
|
316
|
179
|
200
|
165
|
F07
|
70
|
4
|
9
|
35
|
|
8
|
200
|
64
|
298.4
|
-
|
-
|
22.2
|
384
|
344
|
208
|
300
|
270
|
F10
|
102
|
4
|
11
|
53
|
|
10
|
250
|
71
|
361.9
|
-
|
-
|
25.4
|
434
|
394
|
241
|
300
|
270
|
F10
|
102
|
4
|
11
|
74
|
|
12
|
300
|
81
|
431.8
|
-
|
-
|
25.4
|
520
|
470
|
267
|
400
|
335
|
F14
|
140
|
4
|
18
|
95
|
|
14
|
350
|
92
|
476.3
|
-
|
-
|
28.6
|
544
|
494
|
316
|
400
|
335
|
F14
|
140
|
4
|
18
|
131
|
|
16
|
400
|
102
|
539.7
|
-
|
-
|
28.6
|
643
|
578
|
349
|
500
|
375
|
F16
|
165
|
4
|
22
|
165
|
|
18
|
450
|
114
|
577.8
|
-
|
-
|
31.8
|
660
|
595
|
381
|
500
|
375
|
F16
|
165
|
4
|
22
|
230
|
|
20
|
500
|
127
|
635.0
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1 1/8-8
|
28.6
|
-
|
695
|
630
|
412
|
500
|
375
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F16
|
165
|
4
|
22
|
280
|
|
24
|
600
|
154
|
749.3
|
1 1/4-8
|
31.8
|
-
|
813
|
743
|
473
|
600
|
485
|
F25
|
254
|
8
|
18
|
450
|
|
|
|
|
|
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|
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|
|
|
|
|
|
|
|
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CLASS
300
|
|
SIZE
|
L
|
FLANGE DIMENSION
|
H
|
H1
|
H2
|
D2
|
L1
|
MOUNTING BASE
|
Weight (Kgf)
|
|
inch
|
mm
|
C
|
h
|
a
|
h1
|
TYPE
|
C1
|
n
|
h2
|
|
3
|
80
|
48
|
168.2
|
-
|
-
|
22.2
|
282
|
258
|
142
|
200
|
165
|
F07
|
70
|
4
|
9
|
21
|
|
4
|
100
|
54
|
200.0
|
-
|
-
|
22.2
|
294
|
270
|
162
|
200
|
165
|
F07
|
70
|
4
|
9
|
27
|
|
5
|
125
|
59
|
234.9
|
-
|
-
|
22.2
|
319
|
295
|
170
|
300
|
270
|
F10
|
102
|
4
|
11
|
38
|
|
6
|
150
|
59
|
269.8
|
-
|
-
|
22.2
|
375
|
336
|
199
|
300
|
270
|
F10
|
102
|
4
|
11
|
45
|
|
8
|
200
|
73
|
330.2
|
-
|
-
|
25.4
|
450
|
400
|
227
|
400
|
335
|
F14
|
140
|
4
|
18
|
72
|
|
10
|
250
|
83
|
387.3
|
1--8
|
25.4
|
-
|
499
|
449
|
265
|
400
|
335
|
F14
|
140
|
4
|
18
|
135
|
|
12
|
300
|
92
|
450.8
|
1 1/8-8
|
28.6
|
-
|
562
|
497
|
302
|
500
|
375
|
F16
|
165
|
4
|
22
|
148
|
|
14
|
350
|
117
|
514.3
|
1 1/4-8
|
28.6
|
-
|
616
|
551
|
328
|
500
|
375
|
F16
|
165
|
4
|
22
|
208
|
|
16
|
400
|
133
|
571.5
|
1 1/4-8
|
31.8
|
-
|
676
|
606
|
367
|
600
|
485
|
F25
|
254
|
8
|
18
|
298
|
|
18
|
450
|
149
|
628.6
|
1 1/4-8
|
31.8
|
-
|
711
|
641
|
402
|
600
|
485
|
F25
|
254
|
8
|
18
|
382
|
|
20
|
500
|
159
|
685.8
|
1 1/4-8
|
31.8
|
-
|
798
|
721
|
432
|
700
|
520
|
F30
|
298
|
8
|
22
|
450
|
|
24
|
600
|
181
|
812.8
|
1 1/2-8
|
38.1
|
-
|
914
|
837
|
530
|
700
|
515
|
F30
|
298
|
8
|
22
|
680
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
CLASS
600
|
|
SIZE
|
L
|
FLANGE DIMENSION
|
H
|
H1
|
H2
|
D2
|
L1
|
MOUNTING BASE
|
Weight (Kgf)
|
|
inch
|
mm
|
C
|
h
|
a
|
h1
|
TYPE
|
C1
|
n
|
h2
|
|
3
|
80
|
54
|
168.2
|
-
|
-
|
22.2
|
289
|
265
|
148
|
200
|
165
|
F07
|
70
|
4
|
9
|
29
|
|
4
|
100
|
64
|
215.9
|
-
|
-
|
25.4
|
370
|
330
|
180
|
300
|
270
|
F10
|
102
|
4
|
11
|
38
|
|
5
|
125
|
78
|
266.7
|
-
|
-
|
28.6
|
405
|
355
|
195
|
400
|
335
|
F14
|
140
|
4
|
18
|
55
|
|
6
|
150
|
78
|
292.1
|
1--8
|
25.4
|
-
|
420
|
370
|
225
|
400
|
335
|
F14
|
140
|
4
|
18
|
75
|
|
8
|
200
|
102
|
349.2
|
1 1/8-8
|
28.6
|
-
|
490
|
425
|
255
|
500
|
375
|
F16
|
165
|
4
|
22
|
136
|
|
10
|
250
|
117
|
431.8
|
1 1/4-8
|
31.8
|
-
|
545
|
480
|
310
|
500
|
375
|
F16
|
165
|
4
|
22
|
200
|
|
12
|
300
|
140
|
488.9
|
1 1/4-8
|
31.8
|
-
|
630
|
560
|
330
|
600
|
485
|
F25
|
254
|
8
|
18
|
295
|
|
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